Brief portrait
Innovative cleanroom solution in ISO 7 quality
For ZEISS, an ultra-modern ISO 7 class cleanroom area was created on two levels in an existing building in order to optimally accommodate the room program in the limited space. The room offers ideal conditions for the production, assembly and coating of optical gratings. The clean room is equipped with modern coating systems that apply thin layers to the gratings and optimize their optical properties. There is also a UV room for further processes and a measuring environment that enables precise analysis. This infrastructure is complemented by laboratories that provide space for special research. Together with the casting room, which enables the production of high-quality substrates, this modern infrastructure ensures that the gratings meet the highest requirements in spectroscopy, semiconductor technology and astronomy.
To achieve the required ISO 7 cleanroom class, an air handling unit with a highly efficient heat recovery system and heating, cooling, dehumidification and humidification functions was installed on the outside of the roof. The necessary air exchange with the corresponding clean room quality is ensured via corresponding filter fan units with air coolers. To ensure the required minimum external volume flows, the respective filter fan units have an external air connection that mixes this air with the recirculated air drawn in.
Smoke extraction from the area is naturally provided by two SHEV skylights that open automatically in the event of a fire and are triggered by the existing and extended fire alarm system. The building's existing systems serve as cooling and heating generators. Corresponding pressure increases and a reverse osmosis system were provided on the drinking water side. On the heating and cooling side, heat exchangers are used for hydraulic separation in order to cope with the different temperature levels.
The area is supplied with nitrogen from the domestic network. Due to the decentralized use (safety cabinet) of oxygen and argon, an additional gas warning system had to be installed to monitor the oxygen concentration in the room air. Highly efficient LED clean room luminaires ensure optimum lighting conditions with minimal energy consumption. All new technical systems were seamlessly integrated into the existing building management system, ensuring maximum control and efficiency.
